Semiconductors can be found everywhere. They are small and smart computer chips that can be used in everyday life – from smartphones, tablets to cars. The chemical element used in the production of semiconductors is silicon and is processed in the form of wafers. The wafers are stored in special plastic cassettes under cleanroom conditions. The demand for semiconductors is set to increase and manufacturers wish to automate the process still further.
Automated handling of wafers
KUKA has developed the world’s first solution from a single source for the automated transfer and handling of semiconductor cassettes. The application consists of a standardized automated guided vehicle (AGV) and a service LBR iiwa lightweight robot. Additionally, a sophisticated gripper system has been developed.
Robotic solutions within the semiconductor industry
Mobility is provided by the KMR 200 CR mobile platform. The platform has Mecanum wheels that has a multi-directional motion. Sensors on the platform assess the environment in real-time thereby avoiding collisions. The human-robot LBR iiwa is installed on the platform. The sensitivity of the robot enables it to handle the sensitive wafer cassettes safely and without vibrations. The third component of the application is a customized gripper. The gripper system has been patented by KUKA.
Software controls mobile robot fleet
Both the hardware and the software of the cleanroom application for wafer handling are from KUKA. The wafer handling software solution blends seamlessly into the Manufacturing Execution System of the semiconductor manufacturers. The fleet manager integrated into the software controls the transfer orders to ensure optimally automated semiconductor production. All solutions are from a single source and are certified. This results in extremely short commissioning times – making the system the most flexible handling system on the market.
